The Study of Pulsed UV Laser Assisted Cryogenic Etching and Its Applications to the Processing of Optoelectronic Devices
碩士 === 國立海洋大學 === 光電科學研究所 === 88 === As a extension of laser-assisted cryoetching\footnote{Through the thesis, we concisely use the term ``PUVLACE'', stands for Pulsed UV Laser Assisted Cryogenic Etching to represent the damage-free, high resolution, and high anisotropic dry etc...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2000
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/63590143858895814092 |