The fabrication and characterization of multilayer PbZr0..5Ti0..5O3 ultrasonic array devices using RF
碩士 === 國立海洋大學 === 電機工程學系 === 88 === ABSTRACT In this thesis, the main content which we research is that the fabrication and characterization of mutilayer PbZr0..5Ti0..5O3 ultrasonic array devices. We use RF magtron sputtering is used to deposit multilayer thin film . The basis...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88364189880161515687 |