Characterization and Synthesis of Copper Films With Insoluble Tungsten By Sputter Deposition

碩士 === 國立海洋大學 === 材料工程研究所 === 88 === Since copper and tungsten are mutually immiscible, Copper with insoluble tungsten is likely to be a noble material for the high-temperature applications. In this study, Cu-W films are prepared by R.F. magnetron sputter deposition technique. With careful control o...

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Bibliographic Details
Main Authors: Liu Chi-Jen, 劉啟人
Other Authors: J. P. Chu
Format: Others
Language:en_US
Published: 2000
Online Access:http://ndltd.ncl.edu.tw/handle/72375747434989507286