The development of a single-chip driving stage with thin-disc type PZT actuators
碩士 === 國立清華大學 === 工程與系統科學系 === 88 ===
Main Author: | 陳明泰 |
---|---|
Other Authors: | 歐陽敏盛 |
Format: | Others |
Language: | zh-TW |
Published: |
2000
|
Online Access: | http://ndltd.ncl.edu.tw/handle/07309050678374861515 |
Similar Items
-
Fabrication and performance of PZT ThinFilms as an Actuator in MEMS
by: Chih-Shun Chiang, et al.
Published: (2002) -
An efficient drive, sensing, and actuation system using PZT stack actuator cells
by: Barragán, Patrick R
Published: (2012) -
A Valveless Micro Impedance Pump Drive by PZT Actuation
by: Chien,Chia-Nan, et al.
Published: (2006) -
Processing Development and Ferroelectric Properties of PZT Thin-Film Piezoelectric Micro-actuator
by: Jun Han Li, et al.
Published: (2001) -
Development of PZT Actuated Valveless Micropump
by: Fathima Rehana Munas, et al.
Published: (2018-04-01)