The Research on the Microwave Electron Cyclotron Resonance (ECR) Plasma Source
博士 === 國立清華大學 === 工程與系統科學系 === 88 === ABSTRACT The goal of this research is to develop high density microwave electron cyclotron resonance (ECR) plasma sources. The research focused on improving the impedance matching between the microwave and the plasma, and the effects of the microw...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/57623969928291051075 |