The Integration of Aluminum and MSQ
碩士 === 國立清華大學 === 電子工程研究所 === 88 === Abstract The integration of aluminum and methylsesquioxane(MSQ) are investigated. First, we fabricated MSQ, titanium nitride (TiN) and Al films, then we study thermal stability of these system with various combination of inter metal dielectr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73076390981922606133 |