Interfacial Reactions of Titanium and Cobalt Metal Thin Films on Silicon

Interfacial Reactions of Titanium and Cobalt Metal Thin Films on Silicon

博士 === 國立清華大學 === 材料科學工程學系 === 88 ===

Bibliographic Details
Main Authors:	Shu-Ming Chang, 張恕銘
Other Authors:	Lih-Juann Chen
Format:	Others
Language:	zh-TW
Published:	2000
Online Access:	http://ndltd.ncl.edu.tw/handle/07714922172874804748

Description
Summary:	博士 === 國立清華大學 === 材料科學工程學系 === 88 ===