Failure research of anodized aluminum parts used in dry etching chambers

• Main Authors: N.W.Liu, 劉乃瑋
• Other Authors: H.C.Shih
• Format: Others
• Language: zh-TW
• Published: 2000
• Online Access: http://ndltd.ncl.edu.tw/handle/76775671413851917949

碩士 === 國立清華大學 === 材料科學工程學系 === 88 ===