A study of Pd ion implantation for electroless Cu metallization
碩士 === 國立清華大學 === 材料科學工程學系 === 88 ===
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| Format: | Others |
| Language: | zh-TW |
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2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15767918087100900860 |
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ndltd-TW-088NTHU0159031 |
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ndltd-TW-088NTHU01590312016-07-08T04:23:16Z http://ndltd.ncl.edu.tw/handle/15767918087100900860 A study of Pd ion implantation for electroless Cu metallization 鈀離子佈植應用於無電鍍銅金屬化製程之研究 蔡懿瑩 碩士 國立清華大學 材料科學工程學系 88 施漢章 2000 學位論文 ; thesis 0 zh-TW |
| collection |
NDLTD |
| language |
zh-TW |
| format |
Others
|
| sources |
NDLTD |
| description |
碩士 === 國立清華大學 === 材料科學工程學系 === 88 ===
|
| author2 |
施漢章 |
| author_facet |
施漢章 蔡懿瑩 |
| author |
蔡懿瑩 |
| spellingShingle |
蔡懿瑩 A study of Pd ion implantation for electroless Cu metallization |
| author_sort |
蔡懿瑩 |
| title |
A study of Pd ion implantation for electroless Cu metallization |
| title_short |
A study of Pd ion implantation for electroless Cu metallization |
| title_full |
A study of Pd ion implantation for electroless Cu metallization |
| title_fullStr |
A study of Pd ion implantation for electroless Cu metallization |
| title_full_unstemmed |
A study of Pd ion implantation for electroless Cu metallization |
| title_sort |
study of pd ion implantation for electroless cu metallization |
| publishDate |
2000 |
| url |
http://ndltd.ncl.edu.tw/handle/15767918087100900860 |
| work_keys_str_mv |
AT càiyìyíng astudyofpdionimplantationforelectrolesscumetallization AT càiyìyíng bǎlízibùzhíyīngyòngyúwúdiàndùtóngjīnshǔhuàzhìchéngzhīyánjiū AT càiyìyíng studyofpdionimplantationforelectrolesscumetallization |
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1718341270050439168 |