Study of Oxygen Plasma Characteristics in the Inductively Coupled Plasma System

Study of Oxygen Plasma Characteristics in the Inductively Coupled Plasma System

碩士 === 國立清華大學 === 材料科學工程學系 === 88 ===

Bibliographic Details
Main Authors:	Yu-Yin Lin, 林于尹
Other Authors:	J. Hwang
Format:	Others
Language:	zh-TW
Published:	2000
Online Access:	http://ndltd.ncl.edu.tw/handle/80748740310059531239

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