| Summary: | 碩士 === 國立交通大學 === 環境工程所 === 88 === The blooming of semiconductor industry has brought serious concerns over its negative environmental impacts. The exhausts from the semiconductor industry contains acidic waste gas and Volatile Organic Compounds(VOCs), including acetone, toluene and trichloroethylene. This study investigated the feasibility of biofiltration technology in removing volatile organic compounds (VOCs) emitted from a semiconductor manufacturing factory. A bench-scale bio-trickling-bed packed with GAC inoculated with mixed consortium of microorganisms was used to evaluate the effectiveness in treating synthetic gas mixture acetone, toluene, and trichloroethylene. Among these microorganisms, three strains of Pseudomonas and strain of Sphingomonas were able to degrade TCE and toluene by co-metabolism. The Pseudomonads were more effective than the Sphingomonas. Over all speaking, the Pseudomonads and Sphingomonas were the major groups of co-metabolizing TCE and toluene, while, Mycobacterium and the Acetobacteriaceae were the main decomposers of acetone.
During the continuous operation of 173 days, the overall removal of total hydrocarbon (THC) reached above 90% when the inlet concentration of THC was kept 2400 ppmv. When the loading capacities of acetone, toluene, and TCE were kept at 120, 77, and 27 g/m3/day, respectively, more than 90% removal efficiencies were achieved all three waste gases. The low environmental impact and the high operation stability in addition to the reasonably high removal efficiency suggest the bio-reactor a promosing technology for treat waste gas from semiconductor industry.
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