Visualization of Mixed Convective Recirculating Gas Flow in a Model Lamp Heated Vertical Single-Wafer Processor
碩士 === 國立交通大學 === 機械工程系 === 88 === Recirculating air flow in a model lamp heated, rapid thermal, vertical single wafer processor for an eight-inch wafer is investigated experimentally by flow visualization. A copper plate is used to simulate the wafer for its better uniformity of the surf...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60645513317547486868 |