The electrostatic Micromirror with Large Inclined Angle and Rotating Motion
碩士 === 國立交通大學 === 機械工程系 === 88 === A novel micro electrostatic mechanism to rotate the micromirror with large inclined angle is designed and fabricated here. In order to have large effective reflecting area, the support structure is fabricated under the mirror plate. The micromirror is fa...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50002052872404468188 |