The electrostatic Micromirror with Large Inclined Angle and Rotating Motion

• Main Authors: Yu-Shin Lin, 林郁欣
• Other Authors: Wensyang Hsu
• Format: Others
• Language: en_US
• Published: 2000
• Online Access: http://ndltd.ncl.edu.tw/handle/50002052872404468188

碩士 === 國立交通大學 === 機械工程系 === 88 === A novel micro electrostatic mechanism to rotate the micromirror with large inclined angle is designed and fabricated here. In order to have large effective reflecting area, the support structure is fabricated under the mirror plate. The micromirror is fabricated by thick photoresist and electroplarting techniques. The fabrication processes are conducted on two wafers. The structures of the electrodes, support and mushroom-like joint are fabricated on an n-type silicon wafer, the micromirror plate is manufactured on the other. The micromirror will tilt an inclined angle after assembly together. There are 10 electrodes under the mirror plate, and the isolated layer between the mirror plate and electrodes is the thin film of silicon dioxide. The micromirror is driven by electrostatic force. When a voltage is applied between the mirror plate and one of the stator poles, the mirror plate will be pulled down. By switching to the next stator pole, the mirror plate will roll around the stator poles. The light injected along the rotating axis to the mirror plate can be reflected to the periphery of the micromirror, when the mirror plate rotates a full circle. This kind of the micromirror can be used in the active endoscope or other optical applications.