The Impact of Epitaxial Layer Thicknesses on the MOS ESD Robustness
碩士 === 國立交通大學 === 電子工程系 === 88 === Electrostatic Discharge(ESD) protection has become more and more important as the device feature size scales down. In daily lives, the charging process occurs when two dissimilar materials rub together and then separate. Throughout the integrated circuit...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2000
|
Online Access: | http://ndltd.ncl.edu.tw/handle/87709237422500242612 |