Substrate bias effect on amorphous diamond-like carbon films deposited by filtered cathodic arc system

碩士 === 國立交通大學 === 材料科學與工程系 === 88 === Substrate bias effect on amorphous diamond-like carbon films deposited by filtered cathodic arc system Student : Yew-Bin Shue Advisor : Dr. Chia-Fu Chen Institute of Materials Science and Engineering National Chia...

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Bibliographic Details
Main Authors: Yew-Bin Shue, 徐耀斌
Other Authors: Chia-Fu Chen
Format: Others
Language:en_US
Published: 2000
Online Access:http://ndltd.ncl.edu.tw/handle/64630020977513269711