Substrate bias effect on amorphous diamond-like carbon films deposited by filtered cathodic arc system
碩士 === 國立交通大學 === 材料科學與工程系 === 88 === Substrate bias effect on amorphous diamond-like carbon films deposited by filtered cathodic arc system Student : Yew-Bin Shue Advisor : Dr. Chia-Fu Chen Institute of Materials Science and Engineering National Chia...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2000
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Online Access: | http://ndltd.ncl.edu.tw/handle/64630020977513269711 |