Using Hotelling T2 Control Chart for Clustered Defects in IC Fabrication
碩士 === 國立交通大學 === 工業工程與管理系 === 88 === All industrial manufacturers ultimately strive to obtain maximum profits. For the integrated circuits (IC) manufacturer, the yield on each wafer is an important index to evaluate profit. During the complicated manufacturing process of a wafer, defects on the waf...
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| Format: | Others |
| Language: | zh-TW |
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1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29728798775221598355 |