The Construction of A Cell Formation Model for Semiconductor Fabrication Factories

• Main Authors: Ming Lee, 李銘
• Other Authors: Muh-Cherng Wu
• Format: Others
• Language: zh-TW
• Published: 1999
• Online Access: http://ndltd.ncl.edu.tw/handle/26722807307271511471

碩士 === 國立交通大學 === 工業工程與管理系 === 88 === In an IC fabrication factory, an effective layout can reduce the operating cost as much as 10 to 30 percent. An IC fab. is a job shop with reentrant characteristics. To improve productivity, cellular manufacturing or group technology method has been widely applied in job shops without reentrant characteristics, yet rarely applied in IC fabs. This research proposes a systematic method of implementing cellular manufacturing concept in an IC fab. This method involves five major stages. In the first stage, we list the requirement of machine type and their sequence for making each operation module. An operation module comprises a set of operations, and the process plan of making a product is described by a set of operation modules. Secondly, we cluster the IC fab. into several ‘processing areas’. Thirdly, for each type of machine, we calculate its effective capacity; and in the subsequent stage, we calculate the number required to meet a given production target. In the last stage, machines in each ‘processing area’ are clustered into several groups, each group is known as a cell. A cell formation algorithm, modified from the simulated annealing algorithm, has been proposed and used in this stage. This algorithm has been tested through the manufacturing data of a typical IC fab.