Fabricated microlens by using an excimer laser
碩士 === 國立成功大學 === 機械工程學系 === 88 === In this work, we try to fabricate single microlens and microlens arrays on PMMA by using an excimer laser with well designed metal masks. First, we measured the etching rates for various mask opening areas and fluences to obtain the dependence of etching rate on t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49142686477318607648 |