鋅銦氧化薄膜氣體感測器之研究
碩士 === 國立成功大學 === 化學工程學系 === 88 === Thin film gas sensor of multicomponent oxides posses better sensitivity than that of single component oxide. It has been intensively studied and widely applied. In the study, the ZnO and In2O3 thin films were prepared by vacuum de-position following with thermal a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96397920503020634051 |