| Summary: | 碩士 === 國立成功大學 === 化學工程學系 === 88 === Thin film gas sensor of multicomponent oxides posses better sensitivity than that of single component oxide. It has been intensively studied and widely applied. In the study, the ZnO and In2O3 thin films were prepared by vacuum de-position following with thermal annealing and oxidation. The effects of atomic ratio, film thickness and deposition sequence on the sensitivity were examined.
The experimental results show that:
1. The grain size increases with the film thickness, and more obvious coalescence of grains. The oxide prepared by depositing Zinc following by Indium has a sponge-like look and a higher specific surface area.
2. Thin film prepared by depositing Zinc following by In-dium has better sensitivity. The sensitivity and its tem-perature dependency decrease as thickness increases.
3. The sensor show a good selectivity for ethanol and CO, and more suitable for detecting ethanol. The sensor also has a very good reproducibility but with a long response time and recovery time.
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