Dynamic Modeling and Vibration Analysis of The Atomic Force Microscope
碩士 === 中原大學 === 機械工程學系 === 88 === The objective of this paper is to formulate the motion equation and to investigate the vibrations of the atomic force microscope (AFM), which has the contact and noncontact types. First, the governing equation of the AFM including both the base oscillator...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13507512341098667966 |