A Study of Qualitative and Quantitative Factors for Wafer Fabrication Facility Layout

• Main Authors: Wen-Jang Jean, 簡文璋
• Other Authors: Hsin Rau
• Format: Others
• Language: zh-TW
• Published: 2000
• Online Access: http://ndltd.ncl.edu.tw/handle/18319377914940204038

碩士 === 中原大學 === 工業工程學系 === 88 === Among the various aspects of wafer manufacturing management, the facility layout problem is one of the most important issues. A better facility layout could promote productivity, reduce material handling efforts, increase equipment utilization, and increase competition, especially for constructing and running 12 inch fabs. In order to consider more actual situation, this research investigates the fab layout from multi-objective, namely, both qualitative and quantitative objectives to search for a near-optimal solution. This research provides a model for searching a near-optimal solution for the fab layout problem with considering the material handling system for the type of spine configuration, the direction of single and two, and the situation of short cut. This model can be described in the following four steps. Firstly, the theory of fuzzy set is applied to quantify the qualitative factors and to get a qualitative matrix. Three qualitative factors are considered, namely, process, gas utilization, and cleanness. Secondly, we decide the weight for these qualitative factors and integrate them with the quantitative factor. Thirdly, the algorithm of simulated annealing is used to find a near-optimal layout. The final step is the result analysis and comparison. This study defines a measure called accordance for evaluating the matching extent of initial expectations for the layout. Meanwhile, when this study compares with cases cited in the literature, it gets better results.