The Study on Vaccum System Control

碩士 === 國立臺北科技大學 === 機電整合研究所 === 87 === The purpose of this research is to develop a monitor controller system in order to measure the sediments’ thickness of the film. It not only helps operators to simply govern the whole process through the Window-based G.U.I. (Graphic User Interface), but also s...

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Bibliographic Details
Main Authors: Chang Hung-Chia, 張宏嘉
Other Authors: John Chou
Format: Others
Language:zh-TW
Online Access:http://ndltd.ncl.edu.tw/handle/16377153819443978527
Description
Summary:碩士 === 國立臺北科技大學 === 機電整合研究所 === 87 === The purpose of this research is to develop a monitor controller system in order to measure the sediments’ thickness of the film. It not only helps operators to simply govern the whole process through the Window-based G.U.I. (Graphic User Interface), but also shortens users’ time in learning use this instrument. The major research concentrates on the measuring technique of the Metal-film Thickness. Since this kind of instruments are imported from overseas and are priced dearly, and the associated thickness controller greatly affects the characteristics of the film. Therefore, the final purpose of this research is to design a concrete system, which contains the hardware interface card and software program developed using the object oriented programming language , Visual Basic,VB, to measure the thickness of the film and to replace the common Metal-film Measuring Instruments. The completed thickness monitor controller system could be easily linked with the database of the personal computer, could set and store the parameter of the film, and could be copied to make the same hardware interface card in order to extend this system for later days. Combining with the power control of electric heater and vent control of sequence, this system will reach the aim, a fully automatic film monitor.