| Summary: | 碩士 === 國立臺北科技大學 === 機電整合研究所 === 87 === The goal of this paper is to study high frequency and low power microwave passive element, using micro-machining techniques and computer aided simulation to establish the relationship between all the geometry of the ements and it’s electrical/magnetial characteristics. The main contents are the designs of narrow-band bandpass filters of 15GHz, 4.7GHz and 27.85GHz by the intergigital method thin film and MEMs techniques. Through CAD and simulation, we get the relationships between the responses and housing, and we also suggest some methods to decrease the diffucuities in manufacturing processes. Finally we write a VB-based software program to help design a prototype interdigital filter. Then we can use CAD to get the tuning rules. According to these methods, we can decrease the times of designing filters.
There are three aspects of my researchses :1.Study the literatures of filter design. 2.Transform the Chebyshev’s lumped element into distributed circuits, then let the transformation process become a softeare program and hope to establish the design data base via simulation and experiments. 3.Do researches about the effects of buckling caused by the temperature variation on microshield lines, especially on the part of thin film. The analysis of thermal stress and the resulted buckling effect is simulated by ANSYS.
The research is completed by the use of computer-simulation to design the high frequency, high Q, low loss of microwave narrow-band bandpass filters, based on micro-machining techniques and establish a tuning rules of the parameters which affect the electrical/magnetical characteristics.
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