Research on Exposure to Chemical Agents during Preventive Maintenance of Ion Implanter in Semiconductor Manufacturing
碩士 === 中國文化大學 === 勞工研究所 === 87 === This research conducted a measurement on the hazardous gaseous environment created during the preventive maintenance of ion implanter used in wafer fabricators by using closed-cell FTIR and electrochemical gaseous hazard detecting system. Fourteen weekly-based real...
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| Format: | Others |
| Language: | zh-TW |
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1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53433818645734914213 |