Anisotropic etching of single crystal silicon
碩士 === 國立臺灣大學 === 機械工程學研究所 === 87 === The anisotropic wet etching of silicon wafers is an important technique in the fabrication of MEMS devices. In this thesis, we explain anisotropic etching behavior from both electrochemical and thermodynamical views and develop a computer simulation program to p...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94039549617192824980 |