Sequencing and Performance Analysis System Design for Semiconductor Manufacturing Cluster Tools: a PVD Example
碩士 === 國立臺灣大學 === 電機工程學研究所 === 87 === Cluster tools have the advantages of shorter cycle times, faster proc-ess development, and better yield for less contamination. Efficient use of cluster tools is naturally very significant to competitive fab operations.In this thesis, we develop a sequencing an...
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| Format: | Others |
| Language: | zh-TW |
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1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/62645735183929421569 |