The Design and Fabrication of CMOS Micromachined RF Inductors
碩士 === 國立臺灣大學 === 電機工程學研究所 === 87 === This thesis presents a new approach to design, fabricate, and optimize CMOS RF spiral inductors. We introduced a novel and completely new micromachining technology to improve the performance of inductor. And this maskless post-process micromachining t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28371334221318391848 |