Epitaxial growth of TiSi2 on Si(001) by rapid thermal annealing
博士 === 國立清華大學 === 材料科學工程學系 === 87 ===
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| Language: | zh-TW |
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1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91706746526522136801 |
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ndltd-TW-087NTHU6159104 |
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ndltd-TW-087NTHU61591042015-10-13T11:46:56Z http://ndltd.ncl.edu.tw/handle/91706746526522136801 Epitaxial growth of TiSi2 on Si(001) by rapid thermal annealing 以快速熱退火法製作之鈦化二矽薄膜在Si(001)基板上之磊晶關係 王立明 博士 國立清華大學 材料科學工程學系 87 Cao, Feng-Fu 吳信田 1998 學位論文 ; thesis 0 zh-TW |
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NDLTD |
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zh-TW |
| format |
Others
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NDLTD |
| description |
博士 === 國立清華大學 === 材料科學工程學系 === 87 ===
|
| author2 |
Cao, Feng-Fu |
| author_facet |
Cao, Feng-Fu 王立明 |
| author |
王立明 |
| spellingShingle |
王立明 Epitaxial growth of TiSi2 on Si(001) by rapid thermal annealing |
| author_sort |
王立明 |
| title |
Epitaxial growth of TiSi2 on Si(001) by rapid thermal annealing |
| title_short |
Epitaxial growth of TiSi2 on Si(001) by rapid thermal annealing |
| title_full |
Epitaxial growth of TiSi2 on Si(001) by rapid thermal annealing |
| title_fullStr |
Epitaxial growth of TiSi2 on Si(001) by rapid thermal annealing |
| title_full_unstemmed |
Epitaxial growth of TiSi2 on Si(001) by rapid thermal annealing |
| title_sort |
epitaxial growth of tisi2 on si(001) by rapid thermal annealing |
| publishDate |
1998 |
| url |
http://ndltd.ncl.edu.tw/handle/91706746526522136801 |
| work_keys_str_mv |
AT wánglìmíng epitaxialgrowthoftisi2onsi001byrapidthermalannealing AT wánglìmíng yǐkuàisùrètuìhuǒfǎzhìzuòzhītàihuàèrxìbáomózàisi001jībǎnshàngzhīlěijīngguānxì |
| _version_ |
1716847739240710144 |