A Study on Sputtered Glass Film for Silicon Anodic Bonding
碩士 === 國立清華大學 === 電機工程學系 === 87 === Silicon Anodic Bonding is an important technology in MEMS fabrication. This thesis is dedicated to the comprehensive study of this technology. In this study, we discussed the basic theorem of sputtering and anodic bonding. We also made the sp...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24698720073748232205 |