A Study on Sputtered Glass Film for Silicon Anodic Bonding
碩士 === 國立清華大學 === 電機工程學系 === 87 === Silicon Anodic Bonding is an important technology in MEMS fabrication. This thesis is dedicated to the comprehensive study of this technology. In this study, we discussed the basic theorem of sputtering and anodic bonding. We also made the sp...
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1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24698720073748232205 |
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ndltd-TW-087NTHU04420852015-10-13T11:46:55Z http://ndltd.ncl.edu.tw/handle/24698720073748232205 A Study on Sputtered Glass Film for Silicon Anodic Bonding 濺鍍玻璃薄膜用於矽晶片陽極接合之研究 Kwan-Hong Liu 劉冠宏 碩士 國立清華大學 電機工程學系 87 Silicon Anodic Bonding is an important technology in MEMS fabrication. This thesis is dedicated to the comprehensive study of this technology. In this study, we discussed the basic theorem of sputtering and anodic bonding. We also made the sputtered glass film by optimization of processing parameters using Robust Design. And then, the glass to silicon bonding current was characterized and its current model was proposed. Finally, we analyzed the composition of the sputtered glass film, and have done some measurements about the bonding strength. Ruey - Shing Huang 黃瑞星 1999 學位論文 ; thesis 59 zh-TW |
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NDLTD |
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zh-TW |
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Others
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NDLTD |
| description |
碩士 === 國立清華大學 === 電機工程學系 === 87 === Silicon Anodic Bonding is an important technology in MEMS fabrication. This thesis is dedicated to the comprehensive
study of this technology.
In this study, we discussed the basic theorem of sputtering and anodic bonding. We also made the sputtered glass film by optimization of processing parameters using Robust Design. And then, the glass to silicon bonding current was characterized
and its current model was proposed.
Finally, we analyzed the composition of the sputtered glass film, and have done some measurements about the bonding
strength.
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| author2 |
Ruey - Shing Huang |
| author_facet |
Ruey - Shing Huang Kwan-Hong Liu 劉冠宏 |
| author |
Kwan-Hong Liu 劉冠宏 |
| spellingShingle |
Kwan-Hong Liu 劉冠宏 A Study on Sputtered Glass Film for Silicon Anodic Bonding |
| author_sort |
Kwan-Hong Liu |
| title |
A Study on Sputtered Glass Film for Silicon Anodic Bonding |
| title_short |
A Study on Sputtered Glass Film for Silicon Anodic Bonding |
| title_full |
A Study on Sputtered Glass Film for Silicon Anodic Bonding |
| title_fullStr |
A Study on Sputtered Glass Film for Silicon Anodic Bonding |
| title_full_unstemmed |
A Study on Sputtered Glass Film for Silicon Anodic Bonding |
| title_sort |
study on sputtered glass film for silicon anodic bonding |
| publishDate |
1999 |
| url |
http://ndltd.ncl.edu.tw/handle/24698720073748232205 |
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