Analysis and Design of Carrier in Chemical Mechanical Polishing

碩士 === 國立清華大學 === 動力機械工程學系 === 87 ===

Bibliographic Details
Main Authors:	Chin-Chieh Chang, 張智傑
Other Authors:	Dein Shaw
Format:	Others
Language:	zh-TW
Published:	1999
Online Access:	http://ndltd.ncl.edu.tw/handle/49861548928964631389

id	ndltd-TW-087NTHU0311088
record_format	oai_dc
spelling	ndltd-TW-087NTHU03110882016-07-11T04:13:21Z http://ndltd.ncl.edu.tw/handle/49861548928964631389 Analysis and Design of Carrier in Chemical Mechanical Polishing 化學機械研磨之晶圓載具的設計與分析 Chin-Chieh Chang 張智傑碩士國立清華大學動力機械工程學系 87 Dein Shaw 蕭德瑛 1999 學位論文 ; thesis 59 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 動力機械工程學系 === 87 ===
author2	Dein Shaw
author_facet	Dein Shaw Chin-Chieh Chang 張智傑
author	Chin-Chieh Chang 張智傑
spellingShingle	Chin-Chieh Chang 張智傑 Analysis and Design of Carrier in Chemical Mechanical Polishing
author_sort	Chin-Chieh Chang
title	Analysis and Design of Carrier in Chemical Mechanical Polishing
title_short	Analysis and Design of Carrier in Chemical Mechanical Polishing
title_full	Analysis and Design of Carrier in Chemical Mechanical Polishing
title_fullStr	Analysis and Design of Carrier in Chemical Mechanical Polishing
title_full_unstemmed	Analysis and Design of Carrier in Chemical Mechanical Polishing
title_sort	analysis and design of carrier in chemical mechanical polishing
publishDate	1999
url	http://ndltd.ncl.edu.tw/handle/49861548928964631389
work_keys_str_mv	AT chinchiehchang analysisanddesignofcarrierinchemicalmechanicalpolishing AT zhāngzhìjié analysisanddesignofcarrierinchemicalmechanicalpolishing AT chinchiehchang huàxuéjīxièyánmózhījīngyuánzàijùdeshèjìyǔfēnxī AT zhāngzhìjié huàxuéjīxièyánmózhījīngyuánzàijùdeshèjìyǔfēnxī
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Analysis and Design of Carrier in Chemical Mechanical Polishing

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