Direct analysis of deposited thin-film in semiconductor manufacturing process by LA-ICP-MS

Direct analysis of deposited thin-film in semiconductor manufacturing process by LA-ICP-MS

碩士 === 國立清華大學 === 原子科學系 === 87 ===

Bibliographic Details
Main Authors:	Chien Teng Hsu, 徐健騰
Other Authors:	M. H. Yang
Format:	Others
Language:	zh-TW
Published:	1999
Online Access:	http://ndltd.ncl.edu.tw/handle/59173178581050237872

Similar Items

Thin film deposition of MgO in different crystal directions
by: Chien-Hsiu Hsu, et al.
Published: (2003)

Deposition of Diamond-like thin film by ICP system
by: S. C. Zhang, et al.
Published: (2004)

Application of genetic algorithm optimization on the physical parameters of the meteorological forecast deposition of thin film semiconductor manufacturing process
by: ChengHsienLi, et al.
Published: (2009)

1.Direct Determination of Noble Metals in Road Dust Samples by ETV-ICP-MS with Slurry Sampling 2.Determination of Trace Element in Oil Samples by ETV-ICP-MS Using Palladium Nanoparticles as Chemical Modifier
by: Wan-Hsuan Hsu, et al.
Published: (2012)

Development of direct solid analysis and depth profiling technique using ICP-MS for the determination of trace elements in semiconductor materials
by: Chi, Po-Hsiang, et al.
Published: (2002)

Elemental speciation for bioanalytical applications: HPLC-ICP-MS and CE-ICP-MS
by: Bird, Susan Mary
Published: (1998)

Chemical deposition and mechanical application of semiconductors thin films
by: B. Tsizh, et al.
Published: (2021-04-01)

Using LA-ICP-MS and ultrasound imaging system to investigate fouling of membrane in wastewater treatment
by: Hsu, Chien-Hua, et al.
Published: (2013)

Characterization of selenide drugs and their metabolites by hydride generation ICP-MS and HPLC/ICP-MS
by: Wang, Lanquing
Published: (2009)

Characterization and optimization of sample introduction systems for ICP-AES, ICP-MS, and LC-MS
by: Tarr, Matthew Aaron
Published: (2009)

Manufacturing process and property analysis of titanium dioxide thin films
by: Hsu Cheng Piao, et al.
Published: (2009)

he study on the magnetism of Diluted Magnetic Semiconductor ZnMnO thin films
by: Wei-teng Chang, et al.
Published: (2006)

Microreactor-Assisted Solution Deposition for Compound Semiconductor Thin Films
by: Chang-Ho Choi, et al.
Published: (2014-05-01)

Study of thin-film transistors with IGZO oxide-based semiconductors film
by: Sung-Ming Hsu, et al.
Published: (2018)

The study of CdS thin film prepared for chemical bath deposition at Low Temperature
by: Ruei-Teng Lin, et al.
Published: (2010)

ANALYSIS OF GEOLOGICAL SAMPLES: COMPARISON OF SOLUTION ICP-MS AND FUSED GLASSES LA-ICP-MS TECHNIQUES
by: Irina V. Nikolaeva, et al.
Published: (2019-05-01)

Accurate Determination of Boron Content in Halite by ICP-OES and ICP-MS
by: Zhang-kuang Peng, et al.
Published: (2019-01-01)

Determination of trace metals in electrolytic copper by ICP OES and ICP-MS
by: Éder José dos Santos, et al.
Published: (2005-09-01)

Preparation of p-Type SnO Semiconductor Thin Films by Reactive DC Magnetron Sputtering and their Application for Thin-Film Transistors
by: LIN, MING-CHIEN, et al.
Published: (2018)

1. Direct determination of trace rare earth elements in seaweeds by USS-ETV-ICP-MS 2. Low temperature vaporization for USS-ETV-ICP-MS determination of trace elements in medicinal activated charcoal
by: Chien-Chou Chen, et al.
Published: (2013)

Fundamental and applied measurements in ICP-MS
by: Carter, Julian Robert
Published: (2002)

Käytetyn ydinpolttoaineen ICP-MS-analytiikka
by: Seppänen, L. (Lauri)
Published: (2018)

Calibration and correction of LA-ICP-MS and LA-MC-ICP-MS analyses for element contents and isotopic ratios
by: Jie Lin, et al.
Published: (2016-06-01)

Thin film semiconductors
by: Juhasz, Csaba
Published: (1968)

Studies of Solution-Processed Oxide Semiconductors, Conductors and Thin Film Transistors
by: Ching-Chien Hu, et al.
Published: (2010)

Study of p-Type Semiconductor SnO and Thin Film Transistors
by: Po-Ching Hsu, et al.
Published: (2014)

Total Arsenic and Arsenic Species Determination in Freshwater Fish by ICP-DRC-MS and HPLC/ICP-DRC-MS Techniques
by: Izabela Komorowicz, et al.
Published: (2019-02-01)

Study of II-VI semiconductor ZnS thin film by pulsed laser deposition
by: Weng, Hong Ren, et al.
Published: (1995)

Regional Classification of Wines By Using Inductively Coupled Plasma-Mass Spectrometry (ICP-MS)
by: Te-Chien Hsu, et al.
Published: (1020)

Spray deposition of thin semiconductor films for use as buffer layers in CuInSâ†2 thin film solar cells
by: Gledhill, Sophie E.
Published: (2002)

Major-to-Ultratrace Elements in Bone-Marrow Fluid as Determined by ICP-AES and ICP-MS
by: HASEGAWA, Takuya, et al.
Published: (2003)

ELEMENTAL DETERMINATION IN LUBRIFICANT OIL AND FUEL OIL BY ICP OES AND DRC-ICP-MS
by: JEFFERSON RODRIGUES DE SOUZA
Published: (2011)

Microwave ECR plasma processing of thin film semiconductors
by: Chau, The-Tu
Published: (2013)

Microwave ECR plasma processing of thin film semiconductors
by: Chau, The-Tu
Published: (2013)

Study of Compound Ultraviolet Laser Direct-Write Annealing Process on Conducting Thin Film Fabrication
by: Chien-Fang Ding, et al.
Published: (2019)

Determination of trace elements in thrombocytes by ICP-MS
by: Hultén, Amanda
Published: (2019)

Ion Transport in a Commercial ICP-MS
by: Larsen, Jessica Joline
Published: (2017)

Novel applications of ICP-MS in the life sciences
by: Elliott, Victoria Louise
Published: (2006)

Application of ICP-MS to the study of Transhimalayan petrogenesis
by: Mei-Fei Chu, et al.
Published: (2006)

Determination of Sn and Cr species by ICP-MS
by: Chao Wen-Syh, et al.
Published: (1998)

Cannot write session to /tmp/vufind_sessions/sess_eij6rntok1t3addrj7aiocjujf