Direct analysis of deposited thin-film in semiconductor manufacturing process by LA-ICP-MS

• Main Authors: Chien Teng Hsu, 徐健騰
• Other Authors: M. H. Yang
• Format: Others
• Language: zh-TW
• Published: 1999
• Online Access: http://ndltd.ncl.edu.tw/handle/59173178581050237872

碩士 === 國立清華大學 === 原子科學系 === 87 ===