Study in 3-dimensional 6-axis Subnanometer Laser Metrology and Subnanometer Real-time Motion Control

Study in 3-dimensional 6-axis Subnanometer Laser Metrology and Subnanometer Real-time Motion Control

碩士 === 國立清華大學 === 物理學系 === 87 ===

Bibliographic Details
Main Authors:	Wei-fen Bair, 白尉芬
Other Authors:	Wei-Tou Ni
Format:	Others
Language:	zh-TW
Published:	1999
Online Access:	http://ndltd.ncl.edu.tw/handle/26033077491551064911

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