Study in 3-dimensional 6-axis Subnanometer Laser Metrology and Subnanometer Real-time Motion Control

碩士 === 國立清華大學 === 物理學系 === 87 ===

Bibliographic Details
Main Authors:	Wei-fen Bair, 白尉芬
Other Authors:	Wei-Tou Ni
Format:	Others
Language:	zh-TW
Published:	1999
Online Access:	http://ndltd.ncl.edu.tw/handle/26033077491551064911

id	ndltd-TW-087NTHU0198042
record_format	oai_dc
spelling	ndltd-TW-087NTHU01980422016-07-11T04:13:21Z http://ndltd.ncl.edu.tw/handle/26033077491551064911 Study in 3-dimensional 6-axis Subnanometer Laser Metrology and Subnanometer Real-time Motion Control 次奈米級三維六次元雷射測長與即時控制系統研究之初步成果 Wei-fen Bair 白尉芬碩士國立清華大學物理學系 87 Wei-Tou Ni 倪維斗 1999 學位論文 ; thesis 0 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 物理學系 === 87 ===
author2	Wei-Tou Ni
author_facet	Wei-Tou Ni Wei-fen Bair 白尉芬
author	Wei-fen Bair 白尉芬
spellingShingle	Wei-fen Bair 白尉芬 Study in 3-dimensional 6-axis Subnanometer Laser Metrology and Subnanometer Real-time Motion Control
author_sort	Wei-fen Bair
title	Study in 3-dimensional 6-axis Subnanometer Laser Metrology and Subnanometer Real-time Motion Control
title_short	Study in 3-dimensional 6-axis Subnanometer Laser Metrology and Subnanometer Real-time Motion Control
title_full	Study in 3-dimensional 6-axis Subnanometer Laser Metrology and Subnanometer Real-time Motion Control
title_fullStr	Study in 3-dimensional 6-axis Subnanometer Laser Metrology and Subnanometer Real-time Motion Control
title_full_unstemmed	Study in 3-dimensional 6-axis Subnanometer Laser Metrology and Subnanometer Real-time Motion Control
title_sort	study in 3-dimensional 6-axis subnanometer laser metrology and subnanometer real-time motion control
publishDate	1999
url	http://ndltd.ncl.edu.tw/handle/26033077491551064911
work_keys_str_mv	AT weifenbair studyin3dimensional6axissubnanometerlasermetrologyandsubnanometerrealtimemotioncontrol AT báiwèifēn studyin3dimensional6axissubnanometerlasermetrologyandsubnanometerrealtimemotioncontrol AT weifenbair cìnàimǐjísānwéiliùcìyuánléishècèzhǎngyǔjíshíkòngzhìxìtǒngyánjiūzhīchūbùchéngguǒ AT báiwèifēn cìnàimǐjísānwéiliùcìyuánléishècèzhǎngyǔjíshíkòngzhìxìtǒngyánjiūzhīchūbùchéngguǒ
_version_	1718342835503104000

Study in 3-dimensional 6-axis Subnanometer Laser Metrology and Subnanometer Real-time Motion Control

Similar Items