Preparation and Properties of PZT Ferroelectric Thick Films by Nanopowder-Metalorganic Decomposition Process
碩士 === 國立清華大學 === 材料科學工程學系 === 87 === Thick films of lead zirconate titanate of the morphotropic phase boundary composition, Pb(Zr0.52Ti0.48)O3, have been fabricated on Pt/Ti/SiO2/Si substrate using a modified MOD spin-coating technique.The films are ceramic-ceramic 0-3 composites made by dispersing...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/11297494275842992289 |