Study on Puled Laser Ablation Deposition of PZT Ferroelectric Thin Films with Low Temperature Process
碩士 === 國立清華大學 === 材料科學工程學系 === 87 === Much attention has been paid to the application of ferroelectric films to the fabrication of integrated capacitors. Pulsed laser deposition (PLD) process is advantageous over other thin film deposition techniques in the accuracy in composition control...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06114036567143360321 |