Deposited Pd-Ag alloy films by a CVD process
碩士 === 國立清華大學 === 化學工程學系 === 87 === Chemical Vapor Deposition(CVD) has wide applications in growing thin solid films and producing fine powders. The method is basically a synthesis of thin solid film or fine particles from gaseous reactants. In my thesis, the precursors are palladium acet...
Main Authors: | , |
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Format: | Others |
Language: | zh-TW |
Published: |
1999
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Online Access: | http://ndltd.ncl.edu.tw/handle/46863553630602397378 |