Mg and Mg+P Ion Implanted GaN Thin Films
碩士 === 國立中央大學 === 物理研究所 === 87 === The structure changes and the optical and electrical characteristics of GaN thin films doped with Mg and P ions implantation were studied. The GaN was grown on c- plane sapphire substrate by metalorganic chemical vapor deposition ( MOCVD ). In this thesi...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1999
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/53733899474249710814 |