Electrical and Optical Properties of Radio-Frequency Magnetron Sputtered High Dielectric Constant Oxide Films
博士 === 國立交通大學 === 電子工程系 === 87 === In this study, we present the physical, electrical and optical properties of Ba(Ti0.8Sn0.2)O3 and (Ba0.7Sr0.3)TiO3 films deposited by RF magnetron sputtering. The effects of deposition temperature and film thickness on the physical properties (grain size, orientati...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19886623688540545409 |