A Study of X-ray Phase-Shifting Masks
碩士 === 國立交通大學 === 電子工程系 === 87 === In this study, we investigated the fabrication of the x-ray phase shifting masks which used the silicon rich nitride as membranes and Al, Mo, and W compound as shifters. The simulation and basic theory are discussed in this article. The silicon rich nitr...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/10006782192771809565 |