The Width-Dependent Hot Carrier Reliability of Deep-Submicron CMOS with Shallow Trench Isolation

碩士 === 國立交通大學 === 電子工程系 === 87 === To improve the packing density of integrated circuits, scaling of CMOS isolation become indispensable. Recently, the shallow-trench-isolation (STI) technology has been widely used to achieve this goal. Moreover, STI can improve the subthreshold hump, bir...

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Bibliographic Details
Main Authors: Wen-Jei Yang, 楊文杰
Other Authors: Steve S. Chung
Format: Others
Language:en_US
Published: 1999
Online Access:http://ndltd.ncl.edu.tw/handle/64955702322560017981