REAL TIME SCANNING TUNNELING MICROSCOPY STUDY OF PHOSPHORUS GROWTH ON Si(100) SURFACE USING PHOSPHINE

碩士 === 國立交通大學 === 物理研究所 === 87 === The adsorption and desorption processes which occur during the interaction of phosphine with Si(100) surfaces have received extensive attention. However, we found that there were still some ambiguous points remaining for explanation in the process. In th...

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Bibliographic Details
Main Authors: Tsai-Hsuan Ku, 顧彩璇
Other Authors: DENG-SUNG LIN
Format: Others
Language:en_US
Published: 1999
Online Access:http://ndltd.ncl.edu.tw/handle/08438290598852964645