The Application of Principal Component Analysis on Multi-Response Optimizing Problems for Copper Chemical and Mechanical Polish Process in Integrated Circuit Fabrication
碩士 === 國立交通大學 === 工業工程與管理系 === 87 === In recent years, optimizing multi-response problems has become an important issue. Many papers have developed various optimization techniques for multi-response problems. However, these techniques are either troublesome for determining the proper weight for ea...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72216067036623832821 |