A Study of Surface Morphology in Thin Films Processing
碩士 === 國立成功大學 === 機械工程學系 === 87 === This article is to discuss the influence of the parameters in the sputtering proceeding upon the morphology and roughness of thin films. We choose aluminum as the material and utilize the orthogonal array experiments and define three levers of the four...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43498238094439907006 |