Simulation of A Piezoelectric Micropump

碩士 === 國立成功大學 === 機械工程學系 === 87 === Microfluidic devices technology has been studied for about 20 years. With the improving capability in Micro-Electro-Mechanical-System (MEMS) technology for microfabrication, the usage of microfluidic devices is getting much broader and can be found in many differe...

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Bibliographic Details
Main Authors: C. Y. Chiu, 邱正宇
Other Authors: S. Y. Lee
Format: Others
Language:zh-TW
Published: 1999
Online Access:http://ndltd.ncl.edu.tw/handle/49752947790081337771