Application of MEMS Technology to Solar Cell Design

• Main Authors: Sung-Wei Lin, 林松葦
• Other Authors: Shih-Ming Yang
• Format: Others
• Language: zh-TW
• Published: 1999
• Online Access: http://ndltd.ncl.edu.tw/handle/94677759606202435979

碩士 === 國立成功大學 === 航空太空工程學系 === 87 === Application of MEMS Technology to Solar Cell Design Abstract Development of integrated circuit technology since the 1960s has been driving toward minisatellite, microsatellite, and not surprisingly, nanosatellite. A satellite system includes many subsystems, and one of the most important is the power system. Application of Micro-Electro-Mechanical Systems (MEMS) technology to solar cell design and fabrication is the first step to realize micro- and/or nanosatellite. This thesis presents solar cell fabrication by MEMS technology. Five photomasks are made, each is for (1) solar cell assemblies, (2) solar cells, (3) doping ions, (4) chemical vapor deposition (CVD) isolated layer, and (5) metal layers in solar cells. MEMS processes such as wafer cleaning, anodic bonding, photolithography, wet etching, ion doping, chemical vapor deposition, DC sputtering, and dry etching are conducted in the solar cell fabrication. A solar cell can be fabricated in one cycle and the production cost can also be reduced by batch fabrication.