A study of microstructure and properties of TiN prepared by cathodic arc ion plating

• Main Authors: Frank Kao, 高穗安
• Other Authors: Fuh-Sheng Shieu
• Format: Others
• Language: zh-TW
• Published: 1999
• Online Access: http://ndltd.ncl.edu.tw/handle/39115559694237910565

碩士 === 國立中興大學 === 材料工程學研究所 === 87 === Abstract TiN thin films prepared by cathodic arc ion plating are wildly used as a hard coating for cutting tools in industry due to its good wear- and corrosion-resistance. Experiments were carried out to deposit TiN on a type 304 stainless steel for different substrate bias ranging from -100 to -300 V, and nitrogen pressure ranging from 10 to 30 mTorr. With the different coating conditions, the mechanical and corrosion properties and microstructure of the TiN thin films were studied. Characterization of the microstructure of the TiN thin films was done both by transmission electron microscopy (TEM) and scanning electron microscopy (SEM). Macro-particles on the surface of TiN thin films were observed by scanning electron microscopy. Investigation of the macro-particles using TEM indicates that the macro-particles is composed of metallic Ti in the center and the outside is covered by a layer of TiN. The TEM result also shows that the specimen distance to the Ti target has pronounced effect on the thickness of the TiN coatings. The preferred orientation of TiN thin films was studied by x-ray diffraction (XRD) analysis. The x-ray spectra reveal strong (111) texture in the specimens at all coating conditions. It is found that the hardness of TiN thin films decreases with increasing the substrate bias from -100 to -300 V. The reverse trend is observed for increasing the nitrogen pressure. The corrosion behavior of the TiN coated steel in an aerated 30 % sulfuric acid for 7 days was investigated by scanning electron microscopy, which shows good corrosion resistance of the TiN prepared by cathodic arc ion plating.